Applications:
Industrial harmfulness gas treatment
Semiconductor process harmfulness gas treatment
Engine and Boiler exhaust gas treatment
Material plasma surface treatment
Semicondoctor bonding process
NOx/SOx treatment
Film treatment
G7, G8 LCD surface treatment
Specifications:
- Plasma Power Device
- Input Volt: Single phase or 3phase 220V 60Hz
- Output: 2/4/6/8/12kW, +/-15kVpeak
- Frequency: 5~30kHz
- Plasma Torch Power
- Output: 0~2,000Vdc, 0~25KAdc, 25MW
- Controller: Full Digital 32bit DSP
- Data Collect : 8Ch/20Min
- Plasma Power Device
- LCD/PDP Plasma Clean
- Gas ballast plasma clean
- Coating Increase
- Plasma Torch Power
- High temp plasma(torch) power
- Super conductivity magnet coil power
- MRI NMR medical device
- Laser power
- Minimum Order: one unit
