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Without using any inflammable gas (ex, LPG and Metan). CF4 is decomposed 95% by only using Electricity. Despite of instant power off, the machine keep running by "Power Vaccine" function. To save maintenance cost with a longer durability of Electrode Power supply has the highest reliability.
- Plasma + Water - treatment Method.
- Above NF3 95%, CF4 96% to be decomposed.
- There is no emitting of "NOx".
- Durability of the electrode is more than 6 months.
- With Sensor and Tank for a leakage of water.
- To monitor internal temperature and pH.
- Designed against corrosion with Teflon coating.
- "Power Vaccine" function.
- Automatic Bypass function in emergency.
Clean ESD Polyimide, AP Plasma Power Supply, Induction Oven