The vacuum ball valve used for semiconductor vacuum operation, the vacuum chamber...etc. The manufacturing process of the semiconductor industry requires the highest standard of ball valves-used in the production process of laboratories, special gas fields, semiconductor and pharmaceutical industries. The 2-way vacuum ball valve is designed to contain the ball in the central vacuum chamber and open and close by rotating the valve stem 90° (1/4 turn) back and forth. The flow of the three-way ball valve can also be transferred manually or pneumatically through a quarter turn.

Specification:

• Body material: 
  • CF3M/SS316L sulfur 0.005% ~ 0.017%
• Ball gasket material: 
  • PTFE (the design of the valve pad reduces wear and valve torque)
• Helium Leak Rate:
  • 2 Way Valve: Less than 1 X 10-7 mbar.l/sec.
• Optional:
  • pneumatic / manual

• Multiple connection option:
  • JIS 10K flange
  • KF vacuum flange
  • ISO vacuum flange
  • VCR
• Size: 
  • KF25
  • KF40
  • KF50
  • ISO63
  • ISO80
  • ISO100
• Surface : 
  • Pickled
  • Electro polish to prevent corrosion
  • Mirror polished inside and outside
• Sealed: 
  • PTFE
  • Viton
  • Others…

Feature:

Short cleaning time

Cost-effectiveness

Sanitary connection design with optimized dead angle