Decoration Coating Machine Ebeam Evaporation Machine Deposition System

This equipment is designed for coating precision optical thin film,each system unit and overall structure well meet the optical thin film production process requirements,which suitable for coating anti-reflection film, bandpass film ,IR-Cut filter etc.It equipped with high-precision film thickness control system,excellent performance electron gun,high degree automation coating control system, etc. Its the ideal equipment for coating high precision optical thin film.

Model:ZZS800 Optical thin film coater
Vacuum Chamber:SUS304,Φ800mm×H900mm
Substrate Dome Size:Φ750mm
Substrate Dome Rotation Speed:3rpm to 30rpm(Variable)
Optical Film Thickness Control System:SQC310+6point rotary sensor,full automatic coating control system
Evaporation Source:5kw EB source: 1 units, resistance evaporation
Vacuum System:Rotary Pump + Roots Pump +Diffusion Pumps
Ultimate Vacuum:4.0×10-3Pa