optical coating machine
Model:ZZS1320 Optical thin film coater
Vacuum Chamber:SUS304,Φ1320×H1500MM
Substrate Dome Size:Φ1220mm
Substrate Dome Rotation Speed:3rpm to 30rpm(Variable)
Optical Film Thickness Control System:SQC310+6point rotary sensor,full automatic coating control system
Evaporation Source:EB source: 2 units
Vacuum System:Rotary Pump + Roots Pump +Diffusion Pumps (molecular pump)
Ultimate Vacuum:4.0×10-4Pa
Recover vacuum:From atmosphere to 4 x 10-3 Pa≦12min.
Substrate Heater:350℃ (max.)
Power Requirements:three-phase ,220V/380V±5%,50HZ
Cooling Water Flow Rate:100 /min or greater
Compressed Air Pressure:0.6～0.8MPa
Vacuum Chamber:SUS304,Φ1320×H1500MM
Substrate Dome Size:Φ1220mm
Substrate Dome Rotation Speed:3rpm to 30rpm(Variable)
Optical Film Thickness Control System:SQC310+6point rotary sensor,full automatic coating control system
Evaporation Source:EB source: 2 units
Vacuum System:Rotary Pump + Roots Pump +Diffusion Pumps (molecular pump)
Ultimate Vacuum:4.0×10-4Pa
Recover vacuum:From atmosphere to 4 x 10-3 Pa≦12min.
Substrate Heater:350℃ (max.)
Power Requirements:three-phase ,220V/380V±5%,50HZ
Cooling Water Flow Rate:100 /min or greater
Compressed Air Pressure:0.6～0.8MPa
Certificate
- ISO9001
- ISO1400
Main Products
Vacuum Coating Machine,Optical Coating Machine