MEMS VOA is a precise and adjustable voltage-driven optical component. The key part of the component is MEMS chip; driving voltage produces electrostatic force to drive the micro-mirror on the chip, then to adjust output optical power. It has excellent features such as compact dimension, low power consumption, fast responding, anti-shock, low WDL as well as low PDL. It is successfully applied in military project. It meets reliability standard of Telcordia 1221. MEMS VOA has 2 series: fast responding series and low voltage driving (LOWO) series. Each series has variable models like single wavelength, dual wavelength, and polarization-maintaining.We could also develop and produce other MEMS VOA as customers’ requirement.