compact structure
Quick response
High resolution
Parameters:
Type P51.ZT1S
P51.ZT1K
Units
Active axes Z,θX,θY Z,θX,θY
Sensor SGS -
θX,θY Nominal travel range(0~+120V) ±0.8 ±0.8 mrad±20%
θX,θY Max travel range(-20~+150V) ±1.1 ±1.1 mrad±20%
Z Nominal travel range(0~+120V) 80 80 μm±20%
Z Max travel range(-20~+150V) 110 110 μm±20%
Resolution 0.7(0.1μrad ) 0.25(0.05μrad ) nm
Closed-loop linearity 0.2 - %F.S.
Repeatability 0.1 - %F.S.
Push/pull force capacity 24/8 24/8 N
Unloaded response frequency 400 400 Hz±20%
Max load capacity 2 2 kg
El.capacitance 1.8 1.8 μF±20%
Material aluminum aluminum
Weight 0.7 0.7 Kg±5%
Cable length 1.5 1.5 m±10mm
Quick response
High resolution
Parameters:
Type P51.ZT1S
P51.ZT1K
Units
Active axes Z,θX,θY Z,θX,θY
Sensor SGS -
θX,θY Nominal travel range(0~+120V) ±0.8 ±0.8 mrad±20%
θX,θY Max travel range(-20~+150V) ±1.1 ±1.1 mrad±20%
Z Nominal travel range(0~+120V) 80 80 μm±20%
Z Max travel range(-20~+150V) 110 110 μm±20%
Resolution 0.7(0.1μrad ) 0.25(0.05μrad ) nm
Closed-loop linearity 0.2 - %F.S.
Repeatability 0.1 - %F.S.
Push/pull force capacity 24/8 24/8 N
Unloaded response frequency 400 400 Hz±20%
Max load capacity 2 2 kg
El.capacitance 1.8 1.8 μF±20%
Material aluminum aluminum
Weight 0.7 0.7 Kg±5%
Cable length 1.5 1.5 m±10mm
Main Products
piezo actuators,nanopositioning stages, piezo drivers